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AlNimax™ aluminum nitride is a high purity, fully dense ceramic material that features excellent plasma resistance and superior thermal properties. These characteristics provide improved component life and reliable performance for silicon wafer processing. Manufacturing process flexibility allows the integration of features such as refractory metal layers, electrical terminations and embossed surfaces to provide leading edge solutions.
Product Category
Specialty Ceramics
Specialty Ceramic Type
Aluminum Nitride
Composition or ASTM/EN Cement Type
99.9% AlN
Shape / Form
Custom Shape
Thermal Properties
Thermal Conductivity
80 W/m-K (46.22 BTU-ft/hr-ft²-F)
For more information:
PDF Datasheet
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